FB Grease Lubricated (Hybrid) Molecular Pump

Products

一、product introduction of molecular pump:

The molecular pump is a kind of vacuum pump which is used to transfer momentum to the gas molecules by high-speed rotating rotor, so as to obtain the directional velocity, which is compressed and driven to the exhaust port.

二、Classification of molecular pumps:

1. The traction molecule pump gas molecules collide with the rotor of the high-speed movement to obtain the momentum, which is driven to the outlet of the pump.

2. The turbine molecular pump can be pumped by high-speed rotating blades and stationary blades. Such pumps usually work in the state of molecular flow.

3. Compound molecular pump is a kind of compound molecular vacuum pump which is composed of two kinds of molecular pumps, turbo type and traction type.

三、Structure characteristics of molecular pump:

The compound molecular pump is a series combination of turbo molecular pump and traction molecular pump, which combines the advantages of two pumps. Pump in a wide range of pressure ((10-6 ~ 1Pa) has a large pumping speed and a high compression ratio, which greatly improves the pump outlet pressure. The French company Alcatle produces a composite molecular pump that USES a gas hydrostatic bearing and a dynamic seal, which can be completely oil-free, without the use of a pre-stage pump to exhaust directly into the atmosphere.

四、Design essentials of molecular pump:

In the design of the compound molecular pump, it is necessary to deal with the relationship between the turbine stage and the traction stage. Due to large turbine stage with the extraction area, pumping speed, grade and traction grooved extraction area is lesser, in the connection place of two structures, the turbine blade compressed down to sudden change of the flow of the gas molecules way, make the gas molecule movement in the connection place from order to disorder, to increase the reflux, extraction ability.

Therefore, at the design time, the transition structure should be added at the turbine stage and the traction stage to improve the pumping performance of the pump. With the continuous improvement of compound molecular pump, its application field is more and more widely, on some extraction system can replace the diffusion pump, shorten extraction time, the system and can get no oil pollution, clean vacuum environment.

Model

unit

FB-300

FB-650

FB-1300

FB-2000

High vacuum flange

mm

100CF

100ISO

150CF

160

ISO-K

200CF

200

ISO-K

250CF

250

ISO-K

Fore pipe flange

mm

25KF

40 KF

40 KF

50 KF

Pumping speed

L/s

300

650

1300

1800 / 2000

Compression ration

N2

>108

>109

>109

>108

H2

>1×103

>8×103

>1×104

>1×104

Ultimate pressure

Torr

>3×10-7

>2×10-6

<8×10-8

<5×10-7

<8×10-8

<5×10-8

<8×10-8

<5×10-8

Rotary Speed

rpm

30000

24000

24000

24000

Bearing

/

Grease lubricated ceramic bearing

Start-up time

min

<4

<5

<5

<5

Fore pump speed

L/s

2

4-8

8-15

8-15

Cooling

/

Air

Water

Water/air

Water/air

Cooling water

Temp.

/

≤20

≤20

≤20

Consum.

L/min

/

1

1

1

Mounting position

/

Any

Any

Any

Any

Weight

Kg

11

22

27

35